Criterion

  • Criterion - CHA Industries' premier system for R+D, Pilot line production and Unversity requirements.

  • Criterion with load lock, electron beam gun, substrate heating and lift-off dome.

  • Criterion's chamber view with LO dome (shutter open) and EB Gun.

  • Criterion's OB8 mounted H20 pump

Targeting R+D, Pilot Line Production and university requirements, the new Criterion system offers midrange sizing incorporating both load lock and source isolation options. The Criterion Systems feature a hinged, water-cooled front door and a new frame design. The new chamber design will accommodate many tooling configurations and a variety of deposition sources and combinations of sources. Control is achieved via a touch screen PC/PLC.

  • Vacuum Chamber
    • Type: Water cooled stainless steel
    • Size: 23" D x 20" W x 26" H
    • Volume: 190L or 6.6ft^3
    • Inlet flange: NW 80
    • Source distance: 18"

  • Tooling Options
    • Lift-off dome capacity examples, 5 x 150mm/ 7 x 125mm/ 9x 100mm/19x 75mm
    • Planetary dome capacity examples: 9 x 150mm/12 x 125mm/ 18 x 100mm/ 36 x 75mm

  • Pumping Options
    • Diffusion: 1550 liters/sec
    • Turbomolecular: 1450 liters/sec
    • Cryo: 1500 liters/sec

  • Systems Control Options
    • Manual: Autotech sequencer
    • PLC: Siemens touch screen

  • Vapor Source Options
    • Electron beam gun: 4 x 25cc /4 x 40cc / 6 x 15cc / 6 x 25cc
    • Resistance source
    • Swing source
    • Ion Beam Aided Deposition

  • Power Requirement Options
    • Domestic: 120VAC/60Hz, 208VAC/60Hz
    • International: 220VAC/50Hz

  • Pumping Options
    • Cryo
    • Turbo
    • Diffusion

  • Ultimate Vacuum
    • System 10 -9 Torr
    • Chamber 10 -8 Torr