Spare Parts

Whether your needs are for new or remanufactured systems, sputtering or evaporation systems, or coater systems, you can rely on CHA Industries to deliver the highest levels of productivity and throughput.

SE600/1000 Bell Jar Type Systems

• Miscellaneous Spare Parts
  
• Rebuild Kits
  
• Fixturing
  

Mark 40/50 Type Systems

• Miscellaneous Spare Parts
  
• Rebuild Kits
  
• Fixturing
  

Smart Source

• Spare Parts
  

Sources

• EB Gun
  
• Resistance

Heat

• Arrays

 

Call (510) 683-8554 or email CHA for more information.