Spare Parts

Mark 40/50 Type Systems Miscellaneous Spare Parts

ITEM QTY U/M P/N DESCRIPTION
  1 kit 5-V-40 Complete O-ring kit. (Mark 40, D.P. System)
  1 kit 5-VC-40 Complete O-ring kit. (Mark 40, Cryo System)
  1 kit 5-V-50 Complete O-ring kit (Mark 50, D.P. System)
  1 kit 5-VC-50 Complete O-ring kit. (Mark 50, Cryo System)
  1 ea. 6041 Roughing port screen (for block valve)
  1 ea. 83453 Solenoid Valve - block valve, relay logic
  1 ea. 83453-24VAC Solenoid Valve - block valve, PC/PLC
  1 ea. 6113M4B Ball Check Valve
  1 ea. B1GS4 Toggle Valve
1 ea. 8262B210LT Solenoid Valve, LN2
1 ea. 02X2 LN2 Heater Cartridge
  2 ea. IG100N Ion Gauge Tube, Nonex tubulation
  2 ea. 275-071 Convectron Gauge Tube
  1 ea. DV-6M Thermocouple Gauge Tube (Cryo pumped system)
1 ea. P11031W3AX7657 Pressure switch
  1 ea. P02900-1 Vacuum Sensor Assy (replaces 5898 Snap Switch sensor)
  7 ea. 312135T Light/Lens assembly for Auto Tech IIC. (Include 1 of each of the the following engraved lenses: "Manual", "Off", "Roughing", "Automatic", "Standby", "Hi-Vac", & "Vent".)
  5 box 008010G10 Quartz crystals, sensor head. (10/box)
  4 ea. 6230-21 O-ring, view port
3 ea. 5738-6 Pyrex view port (with o-rings)
  1 ea. 5890-11 Mirror Array
  2 ea. 6066 Rear wire mirror hanger
  1 ea. 6738-47-3 Chamber door micro switch
  1 ea. 5538-1&2 6 inch shutter blade set (1 pkt/res)
  1 ea. 6687-4&5 8 inch shutter blade set (Temescal EB)
  1 ea. 8933-1&2 8 inch shutter blade set. (CHA EB)
  1 ea. 12839-1 Flag Shutter Blade
  1 gal. AW32 Hydraulic Fluid, 1 Gallon
  2 btl. DC704-500CC Diffusion pump fluid, 500cc
  1 gal. 1407K-1GAL Mechanical pump fluid, 1 gallon
  1 ea. 13X Sieve material, 1 pint (for CHA sieve traps)
  1 kit EF75-054HD-99 Heavy Duty Offset Drive Assembly Rebuild Kit
2 ea. 6262-32 MK50 Door Gasket
2 ea. 6262-25 MK40 Door Gasket
  1 ea. 6515 MK40/50 Valve body gasket

 

Mark 40/50 Type Systems Rebuild Kits

ITEM QTY U/M P/N DESCRIPTION
1 kit 6532-99 Mark 40/50 Hi-Vac Valve Rebuild Kit consisting of the following:
2 2-385 16" gate o-ring
3 6227-19 Actuator shaft seal
1 6230-14 Cylinder to shaft seal
1 732CAV312 "CAV" cup packing
1 2500x3000 Poly pack seal
1 6514-6 Actuator shaft bushing, Teflon
1 MAV-2C Cartridge valve
1 D39 Dowel Pin
1 kit 5288-99 Roughing and Foreline Block Valve Components consisting of the following:
2 CB-28218 Piston cup
2 5288-4 Gate
2 5288-5 Actuator Shaft
2 4496-P1 Plate, end actuator
2 N5000225H Retaining ring
2 6186 Lock pin gate
2 6230-4 O-ring end plate
4 6227-10 O-Ring shaft
6 6230-16 O-ring Body
2 6230-12 O-ring Gate
2 7100-3/8 Stato seal

 

Mark 40/50 Type Systems Fixturing

ITEM QTY U/M P/N DESCRIPTION
Heavy Duty Offset Drive spare parts (EF75-054HD):
1 ea. VB20002500250 Ball bearing
1 ea. VB20002625312 Ball bearing
3 ea. VS200S Retaining Ring
1 ea. VH262S Retaining Ring
1 ea. VBDD375875281B Ball bearing
1 ea. B98 Needle bearing
1 ea. IR68 Inner Race
1 ea. 6511-5 Drive Shaft
3 ea. 6227-19 O-ring
2 ea. 6227-8 O-ring
Lift-Off Dome:
4 ea. VBDD375875281F Ball Bearing
8 ea. 5100-37H Retaining Ring
 
Offset Drive spare parts (EF75-054):
1 ea. 6511-5 Drive Shaft
1 ea. B98 Needle Bearing
1 ea. IR68 Inner race
3 ea. 6227-19 O-ring, drive shaft
2 ea. 6227-8 O-ring, drive housing
2 ea. VBDD15622000281250 Ball bearing, drive gear
1 ea. VBDD375875281B Ball bearing, drive housing
 
Planetary Domes:
6 ea. VBDD375875281F Ball bearing, drive housing
3 ea. 6681-7 Dome Hanger (031 model/size)
3 ea. 6344-9 Dome hanger (041 model/size)
3 ea. 6509 Dome hanger (051 model/size)
3 ea. 6709 U-clip (1 each, per dome hanger arm)
100 ea. 8818 Retaining clip (Back-loading Swivel Clip Style)
100 ea. C0210-022-0310S Compression spring (Back-loading Swivel Clip Style)
100 ea. 5555-12H Grip ring (Back-loading Swivel Clip Style)
100 ea. 5827 CHA Coil spring clip. (Front Loading spring clip style)(For substrates 0 to .045 thick)
100 ea. 6359 CHA Extended Coil Spring Clip. (Front Loading spring clip style) (For substrates .045 to .150 thick)

 

Call (510) 683-8554 or email CHA for more information.